High-precision polarized dual low-coherence scanning interferometry for rapid step height measurements.

In this investigation, we propose a polarized dual low-coherence scanning interferometer. The spatial phase-shifting technique and the concept of the dual low coherence are adopted to overcome the scanning conditions of typical low-coherence scanning interferometers and reduce the measurement time. In the proposed interferometer, the scanning interval is not critical because the visibility and the phase are immediately obtained during a scanning procedure, and the whole scanning distance can be significantly reduced by the dual low coherence. To verify the system performance, the surface profiles of a plane mirror and a step height specimen were measured, and it was confirmed that the whole scanning distance was reduced 10 times without any scanning conditions.

Citation

Hyo Mi Park, Seon Ile Seo, Min Seo Cho, Ki-Nam Joo. High-precision polarized dual low-coherence scanning interferometry for rapid step height measurements. Applied optics. 2023 Jan 01;62(1):39-45

PMID: 36606847

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