The WC and CrC Coatings Deposited from Carbonyls Using PE CVD Method-Structure and Properties.

This article presents a comparative study of WC and CrC coatings deposited by the plasma-enhanced chemical vapor method using the hexacarbonyls of W and Cr as precursors. The measured thicknesses of the WC and CrC coatings are equal to ca. 1.5 µm. The WC coating consists of microcolumns with a conical end, with gaps between the microcolumns up to approximately 100 nm, and their structure is formed by nanoparticles in the shape of globules with a diameter of up to 10 nm. In the case of the CrC coating, a cauliflower structure with gaps ranging from 20 to 100 nm was achieved. The diameter of cauliflower grains is from 50 nm to 300 nm. The C content in the WC and CrC coating is 66.5 at.% and 75.5 at.%. The W content is 1.4 at.% and the Cr content in the CrC coating is 1.2 at.%. The hardness and Young's modulus of the WC coating are equal to 9.2 ± 1.2 GPa 440.2 ± 14.2 GPa, respectively. The coefficients of friction and wear volume of the WC coating are equal to 0.7 and -1.6 × 106/+3.3 × 106 µm3, respectively. The hardness and Young's modulus of the CrC coating are 7.5 ± 1.2 GPa and 280 ± 18.5 GPa, respectively. The coefficients of friction and wear volume of the CrC coating are 0.72 and -18.84 × 106/+0.35 × 106 µm3, respectively.

Citation

Marianna Trebuňová, Daniel Kottfer, Karol Kyziol, Mária Kaňuchová, Dávid Medveď, Róbert Džunda, Marta Kianicová, Lukáš Rusinko, Alena Breznická, Mária Csatáryová. The WC and CrC Coatings Deposited from Carbonyls Using PE CVD Method-Structure and Properties. Materials (Basel, Switzerland). 2023 Jul 17;16(14)

PMID: 37512319

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